Conventional gas supply systems are mainly used in 4-6 inch large integrated circuit factories, solar cell production lines below 50MW, light-emitting diode (LED) chip production lines and other electronic industries with medium gas consumption. Their investment scale is medium, the production line may be second-hand equipment, the requirements for gas purity control are not strict, the system is equipped to meet the premise of safety as simple as possible to save investment.
Conventional gas supply systems for common bulk gases are usually set up as on-site gas stations, using on-site liquid storage tanks (LIN, LOX, LAR) or containerized compartments (H2, He) to supply the gases. The gases are transported to the facility through the piping system and delivered directly to the point of use by opening the T-piece.
Specialty gases are supplied by standard cylinders (“50L”). Special gas supply system adopts cylinder cabinet. Configuration of automatic PLC controller, color touch screen; gas panel with pneumatic valves and pressure sensors, automatic switching, automatic nitrogen purge, automatic vacuum-assisted emptying; multiple safety measures, leak detection, remote emergency shutdown; special nitrogen purge origins, etc. The VMB adopts a branch circuit pneumatic valve, nitrogen purge, vacuum-assisted draining. VMB adopts semi-automatic cylinder rack, relay control, automatic switching, manual blowing, manual emptying; VMB main pneumatic valve, nitrogen blowing; branch circuit pneumatic valve, nitrogen blowing, vacuum-assisted emptying. The gas room and exhaust system are categorized according to the type of gas.
Post time: Feb-22-2024