The lasing action in argon fluoride excimer lasers arises through the following process:
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Electric discharge passes through the Ar/F2 gas mix, creating Ar+ ions and electrons.
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Accelerated electrons collide with and excite argon atoms.
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Excited argon atoms Ar* react with fluorine molecules to form the excimer ArF* in an excited state.
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The excimer state spontaneously decays back to unbound argon and fluorine atoms, emitting a 193 nm photon.
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Two mirrors form an optical cavity causing stimulated emission and laser oscillation.
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This stimulates further excimer formation and decay, releasing more 193 nm photons in phase.
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The beam exits through the partially reflective output mirror.
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Pumping maintains the electron density and excitation needed for continued lasing action.
The transient excimer state enables efficient UV generation well below conventional laser transitions.
Post time: Nov-02-2023