Applications of Argon Fluoride Lasers

    The unique 193 nanometer wavelengthoutput of argon fluoride excimer lasers has enabled numerous advanced applications:

• Photolithography – ArF lasers are critical in semiconductor chip manufacturing to pattern small features.

• Laser surgery – The 193nm light can ablate biological tissue with precision.

• UV curing – The high photon energy allows ArF lasers to initiate polymerization in resins.

• Laser processing – ArF lasers can selectively ablate very fine details into plastics and other materials.

• Spectroscopy – The short wavelength can induce fluorescence for analyzing organic compounds.

• Optical sensing – ArF lasers interrogate photonic crystal structures used in chemical detectors.

• Photochemistry – ArF pulsed lasers drive highly selective bond breaking photoreactions.

    With refinements in excimer laser technology, many additional micromachining and photochemical uses for argon fluoride systems continue emerging.