We have more than 100 kinds of products in Special gas, Rare gas and Excimer Laser Gas
Other names: |
Argon fluoride laser gas(193nm);Krypton fluoride laser gas(248nm);(308nm)Xenon chloride laser gas |
Product type: |
ArF,KrF,XeCl,5%F2/He, Kr/Ne,F2/Kr/Ne,Ar/Ne,F2/Ar/Ne |
UN NO. : |
UN1956 |
Cylinder volume: |
11L,16L,20L,49L,50L |
Valve type: |
CGA679,DIN 8,DIN 14 |
品 牌 brand | 机 型 type | 波 长 Wave length | 气体 gas |
ATL | ATL ARF-1 | 193 nm | F2,Ar,Xe,Ne |
ATL KRF-1 | 248 nm | F2,Kr,Xe,Ne | |
TUI | CTFTS-ARFV 2.2 | 193 nm | F2,Ar,He,Ne |
CTFTS-KRFV 2.1 | 248 nm | F2,Kr,He,Ne | |
CTFTS-KRFV 2.2 | 248 nm | F2,Kr,He,Xe,Ne | |
CTMD-ARFV 2.0 | 193 nm | F2,Ar,He,O2,Ne | |
CTMD-XECLV 2.1 | 308 nm | HCl,H2,Xe,Ne | |
CTMN-ARFV 2.0 | 193 nm | F2,Ar,He,Ne | |
CTMN-ARFV 2.1 | 193 nm | F2,Ar,He,Ne | |
CTMN-KRFV 1.0 | 248 nm | F2,Kr,He,Ne | |
CTMN-KRFV 2.0 | 248 nm | F2,Kr,He,Ne | |
CTMN-XECLV 2.0 | 308 nm | HCl,H2,Xe,Ne | |
CTMN-XECLV 5.0 | 308 nm | HCl,H2,Xe,Ne | |
CTMN-XEFV 1.1 | 450nm~520nm | F2,Xe,He,Ne | |
CTMN-XEFV 1.2 | 450nm~520nm | F2,Xe,He,Ne | |
GAM Laser | EX5 ArF | 193 nm | F2,Ar,He,O2,Ne |
EX5 KrF | 248 nm | F2,Kr,He,Ne | |
EX5 XeCl | 308 nm | HCl,H2,Xe,Ne | |
EX10 | 193 nm | F2,Ar,He,Ne | |
EX50 | 193 nm | F2,Ar,He,Ne | |
EX100 | 193 nm | F2,Ar,He,Ne | |
Photomedex | XeCl | 308 nm | HCl,Xe,Ne |
Photoscribe | ArF | 193 nm | F2,Ar,Ne |
KrF | 248 nm | F2,Kr,Ne | |
PotomacPhotonics | ArF | 193 nm | F2,Ar,Ne |
KrF | 248 nm | F2,Kr,Ne | |
Spectranetics | XeCl | 308 nm | HCl,H2,Xe,Ne |
Other names: | Argon fluoride laser gas(193nm);Krypton fluoride laser gas(248nm);(308nm)Xenon chloride laser gas | |
Product type: | ArF,KrF,XeCl,5%F2/He, Kr/Ne,F2/Kr/Ne,Ar/Ne,F2/Ar/Ne | |
UN NO. : | UN1956 | |
Cylinder volume: | 11L,16L,20L,49L,50L | |
Valve type: | CGA679,DIN 8,DIN 14 | |
High power excimer laser gas | ||
Available wavelength | 193 nm | ArF |
248 nm | KrF | |
308 nm | XeCl | |
450nm~520nm | XeF | |
Maximum UV power | 540 W | |
Maximum ultraviolet energy | 1100 mj | |
Repetition frequency | Variable, 1~600 Hz | |
Pulse stability | 0.5%~1%,rms | |
Long-term drift | 0.1%~0.5%,rms | |
Beam distribution | Uniform, Flat top | |
Pulse width | 10~20 ns | |
Relative gas purity | F2, 99.9% | |
Ar, 99.9999% | ||
He, 99.9999% | ||
Ne, 99.9999% | ||
HCl, Electronic | ||
Kr, 99.999% | ||
Xe, 99.999% | ||
O2, 99.999% | ||
H2, 99.999% | ||
Gas operating temperature | - 40 0C ~ + 74 0C | |
Gas pressure | 520 psig ~ 2400 psig / 35 Bar ~ 167 Bar | |
Cylinder specification | 10L、16L、20L、50L | |
Valve interface | CGA 679、CGA 330、CGA 580、DIN 6、DIN 8、DIN 14 |
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