The large-scale gas supply system is mainly for the large-scale mass production of 8-12 inches (1 inch = 25.4 mm) ultra-large-scale integrated circuits factory (gas types include SiH4, N2O, 2, C2F6, NH3, etc.), more than 100 MW of solar cell production lines (gas types include NH3), epitaxial light-emitting diode process line (gas types include NH3), more than 5 generations of liquid crystal display factory (gas types include 4, 3, nf3), optical fiber (gas types include SiCl4), silicon material epitaxial production line (gas types include HCL), and other industries. display factory (gas type includes 4, 3, nf3), optical fiber (gas type includes SiCl4), silicon material epitaxial production line (gas type includes HCL) and other industries. They have huge investment scale, adopt the most advanced process equipment, have high gas demand, and have the most stringent requirements for stable and uninterrupted supply, purity control and safe production.
The bulk common gases of the above factories are mostly supplied centrally by on-site gas production (On-site) or industrial park pipelines (Pipeline). The demand for high-purity nitrogen of an 8-inch ultra-large-scale integrated circuit factory with an annual production capacity of 50,000 wafers is more than 5,000Nm3/h, and the demand for hydrogen of the light-emitting diode epitaxial and silicon epitaxial production line is more than 100Nm3/h.
In addition to specialty gases packaged in ordinary cylinders (50L or less), there are many other types of specialty gases that are commonly packaged in large containers, which are referred to as bulk specialty gases, including Y-cylinders (450L), T-cylinders (980L), container (940L), ISO tanks (22,500L), and torpedo wagons (13,400L), among others.
Bulk Specialty Gas Supply System (BSGS) adopts fully automatic PLC controller with color touch screen; gas panel with pneumatic valve and pressure sensor for automatic switching, automatic nitrogen purge, automatic vacuum-assisted venting; multiple safety protection measures, leakage detection, remote emergency cut-off; special nitrogen purge origins and so on. Special gas adopts independent gas source, multi-use point adopts VMB or VMP split supply, VMB or VMP adopts branch circuit pneumatic valve, nitrogen blowing, vacuum-assisted emptying and so on. Because of the total amount of BSGS gas source is large, mostly adopting independent gas room, independent air extraction system.
Post time: Feb-22-2024